Label Value
DOI 10.1038/s41598-019-40582-x
TITLE Fabrication of capacitive pressure sensor using single crystal diamond cantilever beam
TYPE article
PUBLICATION DATE
Service Status Date Last Checked
Scopus Yes 2019-07-30T02:43:37.427295
Web of Science Yes 2019-07-30T04:35:02.952035
Compendex No 2019-12-18T11:01:39.424450